DTU Nanolab

Shower

To use in case of chemical spillage on your body.

Shower

To use in case of chemical spillage on your body.

SEM Tabletop 1

Exhaust hood

For sample preparation.

Eye rinse

In case you get chemicals or particles in your eye use the eye rinse.

Shower

To use in case of chemical spillage on your body.

Eye rinse

In case you get chemicals or particles in your eye use the eye rinse.

Shower

To use in case of chemical spillage on your body.

Shower

To use in case of chemical spillage on your body.

Eye rinse

In case you get chemicals or particles in your eye use the eye rinse.

Shower

To use in case of chemical spillage on your body.

Eye rinse

In case you get chemicals or particles in your eye use the eye rinse.

Shower

To use in case of chemical spillage on your body.

Shower

To use in case of chemical spillage on your body.

Ax2 Eye rinse

In case you get chemicals or particles in your eye use the eye rinse.

Eye rinse

In case you get chemicals or particles in your eye use the eye rinse.

Eye rinse

In case you get chemicals or particles in your eye use the eye rinse.

Eye rinse

In case you get chemicals or particles in your eye use the eye rinse.

Shower

To use in case of chemical spillage on your body.

Shower

To use in case of chemical spillage on your body.

Eye rinse

In case you get chemicals or particles in your eye use the eye rinse.

Eye rinse

In case you get chemicals or particles in your eye use the eye rinse.

Shower

To use in case of chemical spillage on your body.

Eye rinse

In case you get chemicals or particles in your eye use the eye rinse.

Eye rinse

In case you get chemicals or particles in your eye use the eye rinse.

Shower

To use in case of chemical spillage on your body.

Shower

To use in case of chemical spillage on your body.

DRIE-Pegasus

Playlists for Dry etch Tool Package Training (TPT) Lecture and Dry Etch TPT Training. [Training playlist](https://www.youtube.com/channel/UCJhdUTUJRDNODNiC3V95RQQ/playlists)

E-Beam Evaporator (Temescal)

Instruction videos for Temescal. [Training playlist](https://www.youtube.com/watch?v=XNvnv4R8a5o&list=PLjWVU97LayHCQWuQyHwddJnpsEYfQp0wf)

RCA cleaning

RCA cleaning of wafers. [View training video](https://www.youtube.com/embed/U81QbZsCX9U?rel=0)

AOE

Playlists for Dry etch Tool Package Training (TPT) Lecture and Dry Etch TPT Training. [Training playlist](https://www.youtube.com/channel/UCJhdUTUJRDNODNiC3V95RQQ/playlists)

ASE

Playlists for Dry etch Tool Package Training (TPT) Lecture and Dry Etch TPT Training. [Training playlist](https://www.youtube.com/channel/UCJhdUTUJRDNODNiC3V95RQQ/playlists)

ICP Metal Etch

Playlists for Dry etch Tool Package Training (TPT) Lecture and Dry Etch TPT Training. [Training playlist](https://www.youtube.com/channel/UCJhdUTUJRDNODNiC3V95RQQ/playlists)

III-V ICP

Playlists for Dry etch Tool Package Training (TPT) Lecture and Dry Etch TPT Training. [Training playlist.](https://www.youtube.com/channel/UCJhdUTUJRDNODNiC3V95RQQ/playlists)

AFM Icon-PT 1

Instruction videos for AFM. [Training videos](https://www.youtube.com/watch?v=i6JXopjBiy4&list=PLjWVU97LayHC9xeoG2uv8IaHuY7t-q0Tj)

SEM Supra 3

Instruction video for SEM. [Training video](https://www.youtube.com/watch?v=JuFZUsbSHvQ&list=PLjWVU97LayHAIltgr7pUoeIkwiPuP4Qsj)

Safety at Nanolab

Playlist of videos about safety and training videos in use of fume hoods and wet benches. [Safety playlist](https://www.youtube.com/playlist?list=PLjWVU97LayHBfdXJDUNOEjt0MX5MmJPTs)

Quick Dump Rinse in Fume hoods and wet benches

Instruction video for QDR. [Training video](https://www.youtube.com/watch?v=edMt18Uwq9o&list=PLjWVU97LayHCS7pcUsx1qt7vroSdHciXV)

Aligner: MA6 - 2

Developer: TMAH UV-lithography

Training video for developer robot. [Training video](https://www.youtube.com/watch?v=fs9DRH0Eo3k&list=PLjWVU97LayHCX4sz2AH_YiPbNRmkrBYe5&index=4)

Safety at Nanolab

Playlist of videos about safety and training videos in use of fume hoods and wet benches. [Video playlist](https://www.youtube.com/playlist?list=PLjWVU97LayHBfdXJDUNOEjt0MX5MmJPTs)

Developer: TMAH Manual

Training video for the manual developer. [Training video](https://www.youtube.com/watch?v=btinNzYnLnY&list=PLjWVU97LayHDW8Q1Lxk7RzgAp7nNN0WFF&index=11&t=0s)

Manual Spin Coaters

Training video for manual spin coater. [Training video](https://www.youtube.com/watch?v=_neUkDsQhsM)

Spin Coater: Gamma UV

Spin coater training video. [Training video](https://www.youtube.com/watch?v=3JhM3rmLVpA&list=PLjWVU97LayHCX4sz2AH_YiPbNRmkrBYe5)

SEM Supra 1

Instruction videos for SEM. [Training playlist](https://www.youtube.com/watch?v=JuFZUsbSHvQ&list=PLjWVU97LayHAIltgr7pUoeIkwiPuP4Qsj)

AFM Icon-PT 2

Instruction videos for AFM. [Instruction videos](https://www.youtube.com/watch?v=i6JXopjBiy4&list=PLjWVU97LayHC9xeoG2uv8IaHuY7t-q0Tj)

High temperature furnaces

Instruction video for the phosphorus Drive-in furnace. [Instruction video](https://www.youtube.com/watch?v=Hi-1zN1RVqc&list=PLjWVU97LayHDW8Q1Lxk7RzgAp7nNN0WFF&index=3&t=2s)

Aligner: MA6 - 2

Training video 2 of 2 for mask aligner. [Training video 2](https://www.youtube.com/watch?v=rvUuXYgw-xU&list=PLjWVU97LayHCX4sz2AH_YiPbNRmkrBYe5&index=3)

E-Beam Writer 9500

JEOL 100kV E-Beam lithography tool. [Training playlist](https://www.youtube.com/watch?v=-wZpUNAq8dA)

Polymer Injection Molding

The injection molder is an Engel Victory Tech 80/45 which is a hydraulic machine with single motor. [Labadviser](https://bit.ly/3HumjdG)

AFM Icon-PT 2

Atomic force microscope. For surface topgraphic measurement in either ScanAsyst, contact or tapping mode. [Labadviser](https://bit.ly/3WbpXx3)

XPS-ThermoScientific

ThermoScientific K-alpha XPS, serial KA 1002-07-05-01-02. [Labadviser](https://bit.ly/3wohV9a)

Dektak 3ST stylus profiler

Dektak 3ST stylus profiler. Maximum vertical range 130um. [Labadviser](https://bit.ly/3uJUJBo)

SEM Supra 1

Zeiss Supra 40 VP, serial no. 3225. [Labadviser](https://bit.ly/3YdooAD)

Hot embosser 1

Collin P 300 SV hot embosser Machine nr. 6307-16095-01.

Laser Micromachining Tool

The Laser Micromachining Tool is a microSTRUCT vario from the company 3D-Micromac AG. [Labadviser](https://bit.ly/3Bv097b)

Sputter coater 03

Sputter coater with Au for preparation of SEM samples. [Labadviser](https://bit.ly/3Y8vTbU)

Leica INM 100 (yellow filter)

Leica INM 100 (yellow filter) 2.5x/5x/10x/20x/50x yellow filter+camera+comp.

Noco IR microscope

Noco IR microscope HM-LUX 2.5x/10x/20x/50x IR camera. [Labadviser](https://bit.ly/3WeKAZn)

Polymer dryer 1

This is a polymer dryer which can be used for pre-drying polymers prior to injection molding.

Polymer dryer 2

This is a polymer dryer which can be used for pre-drying polymers prior to injection molding.

Sputter-System (Lesker)

Sputter-system Lesker CMS 18 for DC/AC sputtering. [Labadviser](https://bit.ly/3BsEAUI)

Lifetime scanner MDPmap

Lifetime scanner MDPmap. [Labadviser](https://bit.ly/3uXlYZx)

Hardness tester

Innovatest 422D Micro-Vickers hardness tester for determination of hardness. [Labadviser](https://bit.ly/3BL2Od6)

IBE/IBSD Ionfab 300

Ion Beam Etching of various materials. [Labadviser](https://bit.ly/3FKCnXn)

III-V RIE

RIE for III-V processing. [Labadviser](https://bit.ly/3UP2yR8)

Thermal Evaporator

Thermal evaporation of Aluminum for removing charging of resist when doing EBL on isolating substrates. [Labadviser](https://bit.ly/3uLCiMR)

Drop Shape Analyzer

Krüss DSA100 for measurements of contact angles and surface free energy. [Labadviser](https://bit.ly/3PlJskn)

MVD

Molecular vapor deposition. Antistiction coater of FDTS on stamps. [Labadviser](https://bit.ly/3Fp01Yd)

DRIE-Pegasus 2

DRIE-Pegasus 2. [Labadviser](https://bit.ly/3Pk5C6w)

DRIE-Pegasus

Deep silicon etcher including automatic loader and notch compensation. [Labadviser](https://bit.ly/3UYGfZm)

PECVD3

STS PECVD3, deposition of silicon nitride, oxynitride and glass. Small amounts of metal allowed. [Labadviser](https://bit.ly/3hgEgBN)

Jipelec RTP

For rapid thermal annealing of samples. [Labadviser](https://bit.ly/3Pob3S6)

Polisher/CMP

Machine for polishing and planarization (up to several hundred nanometers) of silicon dioxide samples. [Labadviser](https://bit.ly/3PjG5u6)

Post CMP cleaner

NanoMaster Single Wafer Cleaner for cleaning samples after Chemical Mechanical Polishing. [Labadviser](https://bit.ly/3FKfEdV)

E-Beam Evaporator (Temescal)

For depositing metals by electron-beam evaporation. Include an ion source for in-situ Argon sputtering [Labadviser](https://bit.ly/3hjsIO1)

New wafer storage

Here you can buy wafers.

Fume Hood(RCA)

Fume hood for RCA cleaning. [Labadviser](https://bit.ly/3BFyCjs)

HF Clean (Fume hood (RCA))

To be used with manual RCA cleaning inside Fume hood (RCA). This bath is only for use with clean samples. [Labadviser](http://labadviser.danchip.dtu.dk/index.php/Specific_Process_Knowledge/Etch/Wet_Silicon_Oxide_Etch_%28BHF%29)

Furnace: Boron Drive-in and Pre-dep (A1)

High temperature for oxidation and for boron pre-depositon and drive-in. [Labadviser](https://bit.ly/3WkuvRQ)

Furnace: Gate Oxide (A2)

High temperature anneal and diffusion furnace for growing gate oxide on clean silicon wafers. [Labadviser](https://bit.ly/3PvNYg4)

Furnace: Phosphorus Drive-in (A3)

High temperature anneal and diffusion furnace for annealing and oxidation of Si. [Labadviser](https://bit.ly/3FXzYsi)

Furnace: Phosphorus Predep (A4)

For pre-deposition and drive in of Phosphor in Si. The doping source is phosphorus oxychloride( POCl3). [Labadviser](https://bit.ly/3PFigNB)

RCA (4",6")

RCA1(Organic): NH4O2/H2O2/H20 RCA2(Metal):HCl/H2O2/H2O. [Labadviser](http://labadviser.danchip.dtu.dk/index.php/Specific_Process_Knowledge/Wafer_cleaning)

HF 5% - RCA

5% HF dip after RCA clean. [Labadviser](https://bit.ly/3W5R5he)

Buffered HF-Predep

Buffered HF etch of predep-wafers (p/n). [Labadviser](http://labadviser.danchip.dtu.dk/index.php/Specific_Process_Knowledge/Etch/Wet_Silicon_Oxide_Etch_%28BHF%29)

Spin dryer 2

Spin dryer 2 - For RCA cleaned wafers only. Can take 4" and 6" casettes. [Labadviser](https://bit.ly/3YlQx8y)

AOE

STS Advanced Oxide Etcher for dry etching silicon oxide, silicon (oxy)nitride and quartz. [Labadviser](https://bit.ly/3UP459J)

ASE

STS ICP Advanced Silicon Etcher, multi purpose etch. [Labadviser](https://bit.ly/3FJUk8x)

III-V ICP

Inductively Coupled Plasma etching of III-V materials. [Labadviser](https://bit.ly/3YlR3Dw)

ICP Metal Etch

Inductively Coupled Plasma etching of metals. [Labadviser](https://bit.ly/3PFhQ9Z)

KLA Tencor SurfScan 6420

Particle Wafer Scanner KLA Tencor SurfScan 6420. [Labadviser](https://bit.ly/3BJPxS3)

RTP Smoothing

RTP Smoothing.

Diamond CVD 01

Microwave Plasma Chemical Vapor Deposition (MPCVD) chamber for growth of diamond thin films. SEKI AX5250S. [Labadviser](http://Labadviser)

PECVD4

PECVD of silicon oxide and silicon nitride at 300 °C. The layer can be doped with boron or phosphorous. [Labadviser](https://bit.ly/3hnLNP1)

Imprinter 01

CNI 2.0. Can be used for imprint (hot embossing) up to 200C and UV imprint. [Labadviser](https://bit.ly/3FIkBnI)

Imprinter 02

CNI NIL v1.5 from NILT. Can be used for nanoimprinting and bonding. [Labadviser](https://bit.ly/3Yf0Z1w)

Fume Hood (Service Area)

Fume hood for service purposes, ultrasonic bath. [Labadviser](https://bit.ly/3FYku7G)

Cleaning bench

For cleaning samples before bringing them into the clean room and washing of emptied chemical bottles. [Labadviser](https://bit.ly/3VVVdQZ)

Box washer

Dish washer for wafer boxes.

Wordentec

Wordentec QCL800 Metal evaporator. [Labadviser](https://bit.ly/3YuLpPp)

Si Etch 1: KOH

KOH bath for anisotropic etching of silicon. [Labadviser](https://bit.ly/3C7Du1h)

Oxide etch 1: BHF

Oxide etch. [Labadviser](https://bit.ly/3HLw1Zo)

Si Etch 2: KOH

KOH bath for anisotropic etching of silicon. [Labadviser](https://bit.ly/3Yypt5Z)

Wet bench 01: Si etch

This wet bench contains two KOH baths, one BHF bath and two QDRs with heating.

Nitride etch: H3PO4

Silicon nitride etching in 160 °C warm phosphoric acid. [Labadviser](https://bit.ly/3jfx3ST)

Wet bench 02: Nitride etch

This wet bench contains the 'Nitride Etch' bath and a QDR with heating.

Spin dryer 3

Spin dryer 3. One for 4" and one for 6" casettes. [Labadviser](https://bit.ly/3jaxYEf)

Wafer Cleaning

Bath with 7up for wafer cleaning. [Labadviser](https://bit.ly/3PQAjkd)

Mask Cleaning

Bath with 7up for mask cleaning. [Labadviser](https://bit.ly/3YwjBKE)

Wet bench 03: Wafer and mask cleaning

Contains two 7up baths as well as two dedicated QDRs for mask and wafer rinsing respectively. [Labadviser](https://bit.ly/3PB9Re0)

Poly Si etch

Bath for poly-silicon etch. [Labadviser](https://bit.ly/3HFBGjw)

Oxide etch 2: BHF (clean)

Buffered Oxide etch mainly for clean samples. [Labadviser](https://bit.ly/3V61mce)

Wet bench 04: Oxide & poly etch

Contains two baths: 'Oxide etch' and 'Poly Si etch' as well as two QDRs.

Aluminium Etch

Phosphoric acid bath for wet etching of aluminium. [Labadviser](https://bit.ly/3jhlJWk)

Oxide etch 3: BHF (Clean w. wetting agent)

Oxide etch bath with SIO etchant (BHF with wetting agent). [Labadviser](https://bit.ly/3VZHrgd)

Wet bench 05: Al etch

Contains two baths: 'Aluminium etch' and 'Oxide etch with wetting agent' as well as two QDRs.

Critical Point Dryer

L-CO2 drying to prevent stiction of MEMS-structures. [Labadviser](https://bit.ly/3WuSbmL)

Thickness measurer (Wafers)

Mitutoyo stylus profilometer for measuring sample thickness. [Labadviser](https://bit.ly/3jbSHrt)

Nikon ECLIPSE L200

Optical microscope in D-3 with motorized stage. [Labadviser](https://bit.ly/3PAIikZ)

Thickness measurer

Mitutoyo Stylus thickness measurer. [Labadviser](https://bit.ly/3PzbpW2)

Four point probe - Jandel

To measure resistivities of samples. Takes mall samples and up to 200mm wafers. [Labadviser](https://bit.ly/3FGgJSO)

Leitz Medilux

Leitz Medilux 2.5x/5x/10x/20x/50x camera+comp. [Labadviser](https://bit.ly/3jf4025)

Electroplating-Ni

Electroplating of nickel in a nickel sulfamate/boric acid based bath. Technotrans microform.200. [Labadviser](https://bit.ly/3iXfO9v)

Wet bench 07: Lift-off

The bench for Lift off. A bath with NMP remover 1165, a bath with IPA and a DI water bath for rinse.

Wet bench 06: Resist strip

The bench for Resist strip. A bath with NMP remover 1165, a bath with IPA and a DI water bath for rinse.

Fume hood 08: III-V solvents

Fume hood for III-V solvents. [Labadviser](https://bit.ly/3jdCORe)

Fume hood 07: III-V acids/bases

Fume hood for III-V acids & bases. [Labadviser](https://bit.ly/3FuThba)

Fume hood 06: Si etch

For etching silicon in the built in bath 'Si etch 3: KOH' and for processes related to electroplating. [Labadviser](https://bit.ly/3BLAzem)

Cupboards with ventilation

For storage of chemicals.

Work space in Fume Hood 06

Workspace for KOH etch in beaker and Cleaning of Ni-plating items. [Labadviser](https://bit.ly/3W5H8AH)

Si Etch 3: KOH

KOH bath for anisotropic etching of silicon. For wafers with metals. [Labadviser](https://bit.ly/3Yypzun)

Fume hood 05: Special purpose & nanoparticles

Fume hood for special setups and handling of nanoparticles. [Labadviser](https://bit.ly/3hBwYZi)

Microscope: Nikon ECLIPSE L200N 3

Microscope: Nikon ECLIPSE L200N 3.

Aligner: Maskless 01 (MLA1)

Maskless aligner MLA100 from Heidelberg Instruments GmbH. [Labadviser](https://bit.ly/3G31Vzh)

KS Aligner

Karl Süss MA6 contact aligner. [Labadviser](https://bit.ly/3hHj9IO)

Aligner: MA6 - 2

Süss MA6/BA6 contact mask aligner and bond aligner. [Labadviser](https://bit.ly/3YINrfc)

Wafer Bonder 02

Süss Microtec Substrate Bonder SB6 Gen2. [Labadviser](https://bit.ly/3BGhxWE)

Fume hood 09: UV development

Fume hood mainly for development of UV resists. [Labadviser](https://bit.ly/3hBdnIU)

Fume hood 10: e-beam development

Fum Hood ONLY for E-beam development. [Labadviser](https://bit.ly/3G2dp5W)

Cupboards with ventilation

For storage of chemicals.

Developer: TMAH Manual

Laurell EDC-650-23 puddle developer for single wafer or chip development of resist using TMAH (R2D2). [Labadviser](https://bit.ly/3uZKVmZ)

Developer: E-beam

Laurell EDC 650 puddle developer for single wafer development of e-beam resist (a.k.a. RastaR2D2).

Spin Coater: RCD8

Spin coater for single wafer coating of SU-8 resists. Süss MicroTec model RCD8 T. [Labadviser](https://bit.ly/3j8AhI1)

Hotplate 1 (SU8)

Hotplate for SU-8. Programmable with ramping possibilities. Max. temperature 110°C. [Labadviser](https://bit.ly/3YuFRoo)

Hotplate 2 (SU8)

Hotplate for SU-8 baking. Max. temperature 110°C. [Labadviser](https://bit.ly/3j6Stld)

Developer: TMAH UV-lithography

Puddle developer robot for batch development of UV resist using TMAH. Süss MicroTec model Gamma 2M. [Labadviser](https://bit.ly/3hysqmv)

Oven: HMDS - 2

HMS ovn from YES, model 310TA-E. [Labadviser](https://bit.ly/3G2dt5G)

Spin Coater: Gamma e-beam & UV

Spin coater robot for batch spin coating of e-beam and UV resists. Süss MicroTec model Gamma 4M. [Labadviser](https://bit.ly/3hzfdtE)

Spin Coater: Gamma UV

Spin coater robot for batch spin coating of UV resists. Süss MicroTec model Gamma 2M. [Labadviser](https://bit.ly/3huScIx)

Microscope: Nikon ECLIPSE L200N 4

Microscope: Nikon ECLIPSE L200N 4.

Spin Coater: Labspin 02

Spin coater for single wafer coating of standard UV and E-beam resists in dedicated bowls. [Labadviser](https://bit.ly/3FCRCQP)

Wet bench 08: Spinner

Flow bench with Spin Coater: Labspin 02 and two hotplates installed.

Fume hood 11: Lithography cleaning

Fume hood for cleaning of spinner parts and for handling of resists. [Labadviser](https://bit.ly/3HHoCu1)

Spin Coater: LabSpin 03

Spin coater for single wafer coating of standard UV and E-beam resists in dedicated bowls. [Labadviser](https://bit.ly/3G36k54)

Wet bench 09: Spinner

Flow bench with Spin Coater: Labspin 03 and two hotplates installed.

Furnace: LPCVD Poly-Si (6") (E2)

Poly Silicon or amorphous silicon deposition on 4" and 6" wafers. Can be doped in-situ with boron. [Labadviser](https://bit.ly/3Wpl4k7)

Furnace: LPCVD Nitride (6") (E3)

Low stress nitride (LPCVD) deposition on 4" and 6" wafers. [Labadviser](https://bit.ly/3HJZCSG)

Nikon ME 600

Nikon ME 600 mag. 5x/10x/20x/50x/100x Nomarski camera +comp. [Labadviser](https://bit.ly/3WoyFbm)

CV-profiler

Electrochemical CV-profiler for making carrier-density profiles of doped semiconductors. [Labadviser](https://bit.ly/3hujNJX)

PL-mapper

PL-mapper. [Labadviser](https://bit.ly/3G0OI9R)

FFU Airflow

Noise measurements in cleanroom

Particle measurements in cleanroom

Fan filter replacement in cleanroom (2022)

XRD SmartLab

XRD SmartLab. [Labadviser](https://bit.ly/3BFlcUL)

Ellipsometer M-2000V

Ellipsometer M-2000V (Lesker system). [Labadviser](https://bit.ly/3VRkBr6)

ALD 2 (PEALD)

Picosun thermal ALD/PEALD model R200 with plasma source. [Labadviser](https://bit.ly/3V2AVnv)

ALD 1

Thermal ALD Picosun R200. Deposition of thin layers of Al2O3, TiO2, HfO2, ZnO and AZO (Al-doped ZnO). [Labadviser](https://bit.ly/3PykZbL)

Spin coater: Süss Stepper

Spin coater robot for batch coating of BARC and DUV resists. Süss MicroTec model Gamma 2M. [Labadviser](https://bit.ly/3FXttVx)

Microscope: Zeiss Axiotron 2

Ocular: 10x Objective: 5x,10x,20x,50x. [Labadviser](https://bit.ly/3V8LIwL)

Developer: TMAH Stepper

Pudle developer robot for batch development of stepper resist using TMAH. Süss MicroTec model Gamma 2M. [Labadviser](https://bit.ly/3VbjQb4)

DUV Stepper

Canon FPA-3000 EX4 - Deep UV Stepper lithography tool (250 nm). [Labadviser](https://bit.ly/3VczN0K)

Fume hood 04: Solvents

Fume hood for solvents. [Labadviser](https://bit.ly/3Wnqqgl)

Fume hood 03: Solvents

Fume hood for solvents. Can be used for lift-off and other "dirty" processes. [Labadviser](https://bit.ly/3hwNJVM)

Cupboards with ventilation

For storage of chemicals.

Fume hood 02: Acids/bases

Fume hood for acids & bases. [Labadviser](https://bit.ly/3j76PSB)

Fume hood 01: Acids/bases

Fume hood for acids & bases. [Labadviser](https://bit.ly/3BLx7QZ)

Furnace: Anneal-oxide (C1)

For oxidation and annealing of Si, e.g with layers of oxide, poly Si or BPSG glass. Takes 4" and 6" Si. [Labadviser](https://bit.ly/3hCD0c9)

Furnace: Anneal-bond (C3)

High temperature anneal furnace (less clean). Mainly for fusion bonded wafer. [Labadviser](http://labadviser.danchip.dtu.dk/index.php/Specific_Process_Knowledge/Thermal_Process/C3_Anneal-bond_furnace)

Furnace: Anneal-bond (C3)

High temperature anneal furnace (less clean). Mainly for fusion bonded wafer. [Labadviser](https://bit.ly/3FXUkSp)

Furnace: Al-Anneal (C4)

Low temperature Al-Anneal furnace. Up to 450°C. [Labadviser](https://bit.ly/3FUOJMH)

Furnace: LPCVD Nitride (4") (B2)

Stoichiometric Silicon Nitride (LPCVD) deposition on 4" wafers. [Labadviser](https://bit.ly/3FmWIjX)

Furnace: LPCVD TEOS (B3)

TEOS Glass deposition on 4" wafers. [Labadviser](https://bit.ly/3Wd3bVM)

Furnace: LPCVD Poly-Si (4") (B4)

Poly Silicon or amorphous silicon deposition on 4" wafers. Can be doped in-situ with boron or phosphor. [Labadviser](https://bit.ly/3Bp5n4k)

Hotplate: 90-110C

Hotplate: 90-110C is used for baking of 2" - 6" wafers. Do not exceed 120°C. [Labadviser](https://bit.ly/3v0X5vK)

Plasma Asher 1

Plasma asher, photoresist strip, metal allowed. [Labadviser](https://bit.ly/3HI1M5w)

Ellipsometer VASE

Ellipsometer spring 2013. Measures thicknesses of thin films. [Labadviser](https://bit.ly/3WmIB59)

Microscope: Zeiss Jenatech (particle meas.)

Optical microscope Zeiss Jenatech (particle meas.) 5x/10x/20x/50x/100x Nomarski. [Labadviser](https://bit.ly/3HEuTqj)

Filmtek

Filmtek 4000 Spectrometer. Measures thicknesses of thin films. [Labadviser](https://bit.ly/3BIkiXr)

DektakXTA

Dektak XTA stylus profiler. [Labadviser](https://bit.ly/3FAfSTD)

Optical Profiler (Sensofar)

3D Optical Profiler, Confocal/Interferometric mode. [Labadviser](https://bit.ly/3FD5kTN)

Oven: 110 - 250C

Oven 110°C - 250°C. Return to 110°C after use. [Labadviser](https://bit.ly/3W43SRs)

Oven 250C

Oven 250°C for pretreatment. Not for burning resist. [Labadviser](https://bit.ly/3uYZbfT)

SEM Supra 3

Zeiss Supra 40VP SEM with HDasB detector, serial no. 4825. [Labadviser](https://bit.ly/3hBaurl)

SEM Supra 2

SEM Zeiss Supra 60VP with Fjeld M-200 airlock and Oxford Instruments X-MaxN 50 mm2 SDD detector. [Labadviser](https://bit.ly/3HCDHNn)

DRIE-Pegasus 3 and Pegasus 4

DRIE-Pegasus 3 and Pegasus 4. [Labadviser](https://labadviser.nanolab.dtu.dk/index.php/Specific_Process_Knowledge/Etch/DRIE-Pegasus)

AFM Icon-PT 1

Atomic force microscope. For surface topgraphic measurement in either ScanAsyst, contact or tapping mode. [Labadviser](https://bit.ly/3W4457c)

Fumehood(Manual Spinner)

Fumehood (Manual Spinner). [Labadviser](https://bit.ly/3FAsHNH)

Spray Coater

Sono-Tek ExactaCoat spray coater. [Labadviser](https://bit.ly/3PuGHNK)

BCB Curing Oven

BCB Curing Oven from ATV. [Labadviser](https://bit.ly/3URO4zV)

Probe station 3 - EPS150Triax

Sputter Coater 04

Sputter coater with Au for preparation of SEM samples. [Labadviser](https://bit.ly/3WaMjiQ)

IR-Camera

Infrared camera.

Inclined UV-lamp

UV-lamp for inclined lithography. [Labadviser](https://bit.ly/3HQ39yO)

Sputter-System Metal-Oxide(PC1)

Sputter system from Lesker, Proline model. [Labadviser](http://Specific Process Knowledge/Thin film deposition/Cluster-based multi-chamber high vacuum sputtering deposition system - LabAdviser (dtu.dk))

Sputter-System Metal-Oxide(PC3)

Plasma Asher 3: Descum

Plasma Asher Pico 2 from Diener. [Labadviser](http://Specific Process Knowledge/Lithography/Strip - LabAdviser (dtu.dk))

RTP2 Jipelec

Jipelec RTP JetFirst. [Labadviser](http://Specific Process Knowledge/Thermal Process/RTP Jipelec 2 - LabAdviser (dtu.dk))

Furnace: Multipurpose annealing

Annealing with H2, N2 up to 1100°C at atmospheric pressure. Vacuum annealing with H2 and N2 up to 1050°C. [Labadviser](https://bit.ly/3BGaKw1)

Wafer Bonder 03

Bonder for pieces and wafers up to 100 mm.

Developer: SU8

Wetbench for development of SU-8 in PGMEA. [Labadviser](https://bit.ly/3FXdDuZ)

Maskless 03 (MLA3)

Heidelberg MLA 150 405nm laser. [Labadviser](http://Specific Process Knowledge/Lithography/UVExposure - LabAdviser (dtu.dk))

Maskless 02 (MLA2)

Heidelberg MLA 150 375nm and 405nm lasers.

Shower

To use in case of chemical spillage on your body.

XPS Nexsa

Thermofisher Scientific Nexsa XPS system with options: 1. UPS 2. ARUPS 3. REELS 4. ISS 5. Raman

Staff gowning

Safety at Nanolab

Playlist of videos about safety and training videos in use of fume hoods and wet benches. [Safety Playlist](https://bit.ly/3XQyG8J)

Safety at Nanolab

Playlist of videos about safety and training videos in use of fume hoods and wet benches. [Safety Playlist](https://bit.ly/3XQyG8J)

Safety at Nanolab

Playlist of videos about safety and training videos in use of fume hoods and wet benches. [Safety Playlist](https://bit.ly/3XQyG8J)

Safety at Nanolab

Playlist of videos about safety and training videos in use of fume hoods and wet benches. [Safety Playlist](https://bit.ly/3XQyG8J)

Safety at Nanolab

Playlist of videos about safety and training videos in use of fume hoods and wet benches. [Safety Playlist](https://bit.ly/3XQyG8J)

Safety at Nanolab

Playlist of videos about safety and training videos in use of fume hoods and wet benches. [Safety Playlist](https://bit.ly/3XQyG8J)

Safety at Nanolab

Playlist of videos about safety and training videos in use of fume hoods and wet benches. [Safety Playlist](https://bit.ly/3XQyG8J)

Safety at Nanolab

Playlist of videos about safety and training videos in use of fume hoods and wet benches. [Safety Playlist](https://bit.ly/3XQyG8J)

Safety at Nanolab

Playlist of videos about safety and training videos in use of fume hoods and wet benches. [Safety Playlist](https://bit.ly/3XQyG8J)

Safety at Nanolab

Playlist of videos about safety and training videos in use of fume hoods and wet benches. [Safety Playlist](https://bit.ly/3XQyG8J)

Safety at Nanolab

Playlist of videos about safety and training videos in use of fume hoods and wet benches. [Safety Playlist](https://bit.ly/3XQyG8J)

Safety at Nanolab

Shower to use in case of chemical spillage on your body. [Safety playlist.](https://www.youtube.com/playlist?list=PLjWVU97LayHBfdXJDUNOEjt0MX5MmJPTs)

Safety at Nanolab

Playlist of videos about safety and training videos in use of fume hoods and wet benches. [Safety Playlist](https://bit.ly/3XQyG8J)

Safety at Nanolab

Playlist of videos about safety and training videos in use of fume hoods and wet benches. [Safety Playlist](https://bit.ly/3XQyG8J)

Shower

To use in case of chemical spillage on your body.

Safety at Nanolab

Playlist of videos about safety and training videos in use of fume hoods and wet benches. [Safety Playlist](https://bit.ly/3XQyG8J)

DRIE-Pegasus 3 and Pegasus 4

DRIE-Pegasus 3 and Pegasus 4. [Training video playlist](https://youtube.com/playlist?list=PLjWVU97LayHBu0XwMGHss5CdEhka6B72U&feature=shared)

Ellipsometer VASE

Ellipsometer spring 2013. Measures thicknesses of thin films. [Labadviser](https://labadviser.nanolab.dtu.dk/index.php/Specific_Process_Knowledge/Characterization/Optical_characterization#Ellipsometer)